| 摘要 |
<p>A humidity sensor capable of detecting humidity by using the feature that the electrical characteristics of the element varies with humidity. A solution of manganese acetate, lead acetate, potassium acetate is applied to an alumina plate on which comb-shaped electrodes are formed, and heat-treated to produce a humidity sensor having a moisture sensitive film containing manganese oxide, lead oxide, and alkali metal compound as its main components. It has a low resistance and an appropriate variation range of the value even when the sensor is miniaturized. It also has a quick response and an excellent environmental resistance. Furthermore, since the sensor and its humidity measuring circuit can be manufactured easily, the sensor can be applied to various field portable equipment, and so forth, in which miniaturization, high-speed response, high-reliability, and low cost are required. <IMAGE></p> |
