| 发明名称 |
Surface profiling using scanning force microscopy |
| 摘要 |
A method and apparatus for profiling surfaces, such as sidewalls of a trench or line, using a scanning force microscope provides improved measurement accuracy by controlling the position of the tip responsive to the real-time measured local slope of the surface.
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| 申请公布号 |
US5283442(A) |
申请公布日期 |
1994.02.01 |
| 申请号 |
US19930056808 |
申请日期 |
1993.05.03 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
MARTIN, YVES;POLER, JORDAN;WICKRAMASINGHE, HEMANTHA K. |
| 分类号 |
G01Q70/10;G01B21/30;G01N21/86;G01Q10/06;G01Q30/04;G01Q60/24;G01Q60/32;G01Q60/38;(IPC1-7):G01N21/86 |
主分类号 |
G01Q70/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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