Rugged 02 microsensor

摘要

A rugged O2 microsensor constructed from Si, and Pt, Si3N4 and ZrO2 thin films which is free standing and isolated from the silicon substrate in combination with a counter electrode and a heater in a bow-tie configuration. The sensor combines an integral heater made from platinum which is deposited on a silicon wafer as a thin film. The thin film heater heats a small yttria-stabilized zirconia sensor that sends a signal proportional to the amount of oxygen in the ambient environment through a counter electrode. The sensor and heater are supported on the silicon wafer by a thin layer of silicon nitride.