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发明名称
METHOD AND DEVICE FOR PRODUCING SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH0624893(A)
申请公布日期
1994.02.01
申请号
JP19920220596
申请日期
1992.07.07
申请人
SUKEGAWA TOKUZO
发明人
SUKEGAWA TOKUZO
分类号
C30B15/02;C30B15/10;C30B15/30;C30B29/40;(IPC1-7):C30B15/30
主分类号
C30B15/02
代理机构
代理人
主权项
地址
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