| 摘要 |
<p>PURPOSE:To make a structure which pulls an air hose around, small, and concurrently lessen sliding sections and the like in number in a carrying device for wafers and the like, which is furnished with the air hose for vacuum absorption. CONSTITUTION:The device is so constituted that a main body is provided with a bracket 18 with which a wafer transshipping arm is slidably combined, an air hose 16 for vacuum absorption is connected to the transshipping arm, and the bracket 18 furnished with the transshipping arm is driven by a motor 12. In this case, a timing pulley 14 and an air hose reel 15 are directly connected to the motor 12, and the take-up and take out actions of the air hose 16 into the air hose reel 15 shall be synchronized with the feed action of the transshipping arm.</p> |
