| 摘要 |
PURPOSE: To produce fine-particle powder having defined particle sizes by vaporizing a metal compound, mixing the vapor with heated H2 in a tube reactor and passing a blowback filter. CONSTITUTION: A metal compound (e.g. TaCl5 ) is introduced into an evaporator 1, 1a, and vaporized at about 200-2,000 deg.C and further the vapor is transported to a gas preheater 2a. On the other hand, a reactant, H2 is heated in a pre- heater 2. The middle stream 6 containing the metal component and the surrounding stream 7 containing the H2 are combined through a nozzle 5 and the combined gas is reacted at about 500-2,000 deg.C in a tube reactor 4 to form Ta and HCl. Then, the formed materials are introduced into a blowback filter 10 and, after depositing, the product is transported to a vessel 11. Thereby, the fine particles of metal Ta, which have defined particle sizes of 1.0 nm to <3μm and wherein <1% of the individual particles deviate by >=40% from the average particle size, and no individual particle deviates by >=60% from the average particle size, are obtained.
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