发明名称 |
Semiconductor sensor including an aperture having a funnel shaped section intersecting a second section |
摘要 |
A semiconductor sensor with a compact structure is provided, which comprises a semiconductor substrate, a semiconductor diaphragm integrally formed with the semiconductor substrate, and a penetrating aperture formed in the semiconductor substrate so as to surround desired sides of the diaphragm. The aperture has first and second funnel-shaped aperatures whose intersecting conic sections open toward opposite directions. A cavity for defining the diaphragm is provided when the semiconductor substrate is subjected to electrolytic etching to form the second funnel-shaped aperture therein.
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申请公布号 |
US5283459(A) |
申请公布日期 |
1994.02.01 |
申请号 |
US19910812848 |
申请日期 |
1991.12.20 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
HIRANO, HIROKAZU;YAMAKI, BUNSHIRO |
分类号 |
G01P15/08;G01P15/12;(IPC1-7):H01L29/66;H01L29/96;H01L29/84 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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