| 摘要 |
PURPOSE:To provide a trap for solid capture which can precipitate solids in sublimate gas with high efficiency for concentrated capture and facilitate maintenance with a simple structure. CONSTITUTION:This is a trap 1 for solid capture which is installed on the exhaust side of a pump for sublimate gas and captures solids precipitated from the sublimate gas discharged from the pump. This trap 1 is provided with a spiral member 30 stored in the casing 10, in which a spiral passage A is also formed.
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