INTRODUCTION OF IMPURITY ATOM

摘要

PURPOSE:To provide a method of introducing impurity atoms into diamond or BN or SiC or organic semiconductor. CONSTITUTION:Impurity particles are accelerated, energized and are applied to diamond or BN or SiC or organic semiconductor material. Diamond or BN or SiC or the organic semiconductor material is exposed to the atmosphere that contains hydrogen radicals or hydrogen ions after irradiated with the accelerated particles.