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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0621071(A)
申请公布日期
1994.01.28
申请号
JP19920178045
申请日期
1992.07.06
申请人
MATSUSHITA ELECTRON CORP
发明人
SAWADA SHIGEKI
分类号
H01L29/73;H01L21/331;H01L29/732;H01L29/737;(IPC1-7):H01L21/331
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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