| 摘要 |
PURPOSE:To stably provide a high output X-ray intermittently feeding a material gas, by forming the content of rhenium gradient composition, and by making an X-ray generating layer a specifically ultra-thin film, when the X-ray generating layer is formed consisting of tungsten-rhenium alloy on a graphic substrate forming an anode through a rhenium intermediate layer. CONSTITUTION:A very ultra-thin film consisting of a tungsten-rhenium alloy of 0.1-5.0mum in thickness that are alternately layered, is formed on the entire surface or on the surface part of an X-ray generating layer. The film is formed by CVD method, and a material gas is intermittently fed to the film surface of a rhenium intermediate layer. Namely, the content of rhenium in the tungsten- rhenium alloy is gradually increased from the interface part between the film and the rhenium intermediate layer to the surface part. The gradient composition is determined by increasing the proportion of the rhenium material gas in the material gas every time or every several times that the material gas is fed intermittently. A thermal crack of the X-ray generating layer is thus restrained, and its propagation to the deep part is eliminated. |
