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发明名称
MULTILAYER INTERCONNECTION STRUCTURE OF SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0621237(A)
申请公布日期
1994.01.28
申请号
JP19920176392
申请日期
1992.07.03
申请人
SEIKO EPSON CORP
发明人
KANAI MASAHIRO
分类号
H01L23/522;H01L21/768;H01L21/8238;H01L27/092;(IPC1-7):H01L21/90
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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