| 摘要 |
<p>PURPOSE:To provide a field emission cathode device where a resistance portion for negative feedback and an electron emission portion of low resistance are installed individually on an emission tip in a comparatively simple process, and to manufacture thereof. CONSTITUTION:A first material layer 40 to form cathode electrode film, a second material layer 42 to form the resistance portion 18b for negative feedback of an emitter tip 18 and a third material layer 44 to form the electron emission portion of the emitter tip 18 are formed. A mask 46 is installed at the position where the emitter tip 18 of the third material layer 44 is formed, and the material layer is etched until an undercut is made at the lower portion of the mask 46, and thereafter, an insulating film and a gate electrode film are formed.</p> |
