| 摘要 |
PURPOSE:To facilitate the manufacture, and to realize a high yield by making two pieces of waveguides intersect in an X shape, and arranging a filter chip in its intersecting part. CONSTITUTION:For instance, by applying a flame accumulation method in common use and dry etching onto an Si substrate, two pieces of waveguides 1, 2 of a quartz compound are formed, each waveguide 1, 2 forms an intersecting part 3 by intersecting with each other in an X shape at an intersecting angle theta, and in this intersecting part 3, a filter chip 4 is arranged. To put it concretely, by allowing an optical axis to be orthogonal to the intersecting part 3, a slit 5 having prescribed depth, width and length is formed, the filter chip 4 is inserted therein, and thereafter, by embedding it with an optical adhesive agent, its filter chip 4 is fixed. As for this filter chip 4, for instance, a half mirror of a dielectric multi-layer film filter structure formed by laminating a thin layer of TiO2 and SiO2 on a glass substrate of 20mum thick, and a wavelength filter are used. |
