ION IMPLANTATION APPARATUS,申请号JP19920174636-传众专利搜索

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发明名称	ION IMPLANTATION APPARATUS
摘要
申请公布号	JPH0620618(A)	申请公布日期	1994.01.28
申请号	JP19920174636	申请日期	1992.07.02
申请人	FUJITSU LTD	发明人	NAGAO KENJI
分类号	H01J27/02;H01L21/265;(IPC1-7):H01J27/02	主分类号	H01J27/02
代理机构		代理人
主权项
地址

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