发明名称 INFRARED DETECTION DEVICE AND ITS MANUFACTURE
摘要 PURPOSE: To provide an infrared detecting device which has an electrical wiring extended on a sidewall of step structures, as molded body parts made of materials sensitive to infrared rays. CONSTITUTION: A compact electrical wiring 4 is formed on a sidewall 1 of an infrared-detecting element having step structures 1 to 3, and a conductive layer 40 is bonded onto the step structures. The conductive layer 40 can be removed at least from a bottom 3 of the step structures by a directional etching process, such as an ion milling, but it does backing on the sidewall 1 as the wiring 4. Thereby there can be formed a compact and dense array of the wirings 4 and 44, including a plurality of wavelength arrays in a body stacked on a circuit substrate 30.
申请公布号 JPH0621423(A) 申请公布日期 1994.01.28
申请号 JP19930057638 申请日期 1993.03.18
申请人 PHILIPS ELECTRON U K LTD 发明人 BURAIAN EDOWAADO MASHIYUUZU;MAIKERU DEIBUITSUDO JIENAA
分类号 G01J1/02;H01L27/144;H01L27/146;H01L31/0224;H01L31/10;H01L31/11;H01L31/18 主分类号 G01J1/02
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