| 摘要 |
<p>PURPOSE:To provide a pair of tweezers which has a vacuum suction function and can carry a wafer stably and securely without damaging it. CONSTITUTION:Contact parts 3a and 4 which are brought into contact with an object are provided on the tips of a pair of arms 2 and 2' which are formed into a V-shape and the object is attracted by vacuum through the contact parts 3a and 4. Particularly, vacuum suction paths 5 and 6 are formed on the respective arms 2 and 2'. The one side ends of the paths 5 and 6 are opened in the contact parts 3a and 4 and the other side ends are connected to an evacuating apparatus. The paths 5 and 6 are opened and closed by the operation of an opening/closing button.</p> |
