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发明名称
SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号
JPH0621475(A)
申请公布日期
1994.01.28
申请号
JP19920171395
申请日期
1992.06.30
申请人
FUJITSU LTD
发明人
EMA TAIJI;HIGUCHI MITSUO
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L29/788
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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