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发明名称
THIN FILM VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH0620957(A)
申请公布日期
1994.01.28
申请号
JP19920198974
申请日期
1992.07.03
申请人
NISSIN ELECTRIC CO LTD
发明人
KUBOTA KIYOSHI
分类号
H01L21/205;C23C16/44;C30B25/02;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
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