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发明名称
CHARGED PARTICLE ENERGY ANALYZER
摘要
申请公布号
JPH0620632(A)
申请公布日期
1994.01.28
申请号
JP19920172939
申请日期
1992.06.30
申请人
SHIMADZU CORP
发明人
MITAMURA SHIGEHIRO
分类号
H01J37/05;H01J37/12;H01J37/244;H01J37/252;H01J49/46;(IPC1-7):H01J37/244
主分类号
H01J37/05
代理机构
代理人
主权项
地址
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