| 摘要 |
PURPOSE:To provide a complex charged particle beam processing observation device enabling observation of not only an image of a sample cross section but also an in-depth inner surface image or a stereoscopic image and the like of a sample, with high resolution. CONSTITUTION:Various pieces of information on the cross section of a sample are stored in a memory circuit 34. When a vertical image of the sample cross section is to be observed, the signal of the cross section is drawn from the memory circuit 34 by designating the position of the sample in the direction Y, and the signal is transferred to an image memory 37, and the image is displayed on a cathode-ray tube 40. When an optionally horizontal image of the sample surface is to be observed, only the signals of the designated position Z of each secondary scanning image signal are drawn out of a plurality of image signals stored in the memory circuit 34, and the signals are re-constructed to form a secondary image signal, which is transferred to the image memory 37. When a stereoscopic image is to be observed, a stereoscopic image is constructed based on the plurality of image signals stored in the memory circuit 34, and the result is transferred to the image memory 37. |
