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发明名称
PREPARATION OF SAMPLE FOR TOTALLY-REFLECTIVE FLUORESCENT X-RAY ANALYSIS
摘要
申请公布号
JPH0621186(A)
申请公布日期
1994.01.28
申请号
JP19920178057
申请日期
1992.07.06
申请人
MATSUSHITA ELECTRON CORP
发明人
SUGIHARA KOHEI
分类号
G01N1/36;G01N1/28;G01N23/223;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01N1/36
代理机构
代理人
主权项
地址
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