Verfahren zur gesteigerten Abscheidung von Siliciumoxid durch Plasma.,申请号DE19883884697T-传众专利搜索

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发明名称	Verfahren zur gesteigerten Abscheidung von Siliciumoxid durch Plasma.
摘要
申请公布号	DE3884697(T2)	申请公布日期	1994.01.27
申请号	DE19883884697T	申请日期	1988.07.13
申请人	THE BOC GROUP, INC., MONTVALE, N.J., US	发明人	LOPATA, EUGENE S., FREEMONT, CA 94536, US;FELTS, JOHN T., ALAMEDA, CA 94501, US
分类号	C23C16/50;C23C14/32;C23C16/40;C23C16/509;C23C16/52;(IPC1-7):C23C16/40	主分类号	C23C16/50
代理机构		代理人
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