| 摘要 |
In working glass material by glass removal for structuring, engraving or cutting, a metal-doped special glass is subjected to a laser beam with a wavelength of delta = 1.06 micron using a Nd-YAG laser. A process gas is applied to the glass workpiece (8), axially to the laser beam (2). The glass is heated, before or during working, to a temp. which is max. the glass softening temp.. The upper and/or lower surface of the glass is polished after the laser working. USE/ADVANTAGE - The technique is for working glass for structures with widths up to 10 micron and glass with a thickness of more than 100 micron. The operation gives the required glass removal action in forming the structures with min. working time.
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| 申请人 |
SCHMIDT, KRISTINA, DIPL.-ING., O-6900 JENA, DE;ECKSTEIN, MANUELA, DR.-ING., O-6019 SUHL, DE;HUELSENBERG, DAGMAR, PROF. DR. DR., 98693 ILMENAU, DE;HORST, HANS-JUERGEN, 98693 ILMENAU, DE |
发明人 |
SCHMIDT, KRISTINA, DIPL.-ING., O-6900 JENA, DE;ECKSTEIN, MANUELA, DR.-ING., O-6019 SUHL, DE;HUELSENBERG, DAGMAR, PROF. DR. DR., 98693 ILMENAU, DE;HORST, HANS-JUERGEN, 98693 ILMENAU, DE |
