| 摘要 |
The device comprises an optic source, an object lens, a galvanometer mirror which deflects an optic path between the optic tape and the object lens, a hologram element (1c) which is set on the optic path between the optic source and the object lens and diffracts the reflected light, and optic detecting element (1b) which is set in a diffraction position of the reflected light and detects the light reflected from the optic tape.
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