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发明名称
摘要
申请公布号
JPH067575(B2)
申请公布日期
1994.01.26
申请号
JP19860102599
申请日期
1986.05.02
申请人
SUMITOMO ELECTRIC INDUSTRIES
发明人
MYANO NAOYA;EHATA TOSHIKI;ISHII MANABU;KATO TAKASHI
分类号
H01L21/768;H01L21/3205;(IPC1-7):H01L21/90
主分类号
H01L21/768
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