| 摘要 |
PURPOSE:To lessen the wettability to and reactivity metal and to prevent the generation of carbon dust by forming an amorphous carbon film on the surface of an isotropic graphite base material having a prescribed bulk density, average pore radius anisotropic ratio and inorg. impurities. CONSTITUTION:This vessel for molten metal is formed by coating the amorphous carbon film on the surface of the isotropic graphite base material. The vessel is used as a crucible for pulling up a silicon single crystal or as a crucible or boat for vapor deposition of gold, zinc, nickel, aluminum, silicon or the alloys thereof. The above-mentioned isotropic graphite base material has 1.7 to 1.9g/cm<3> bulk density, 0.2 to 2mum average pore radius, <=1.05 anisotropic ratio and <=5ppm inorg. impurities. The amorphous carbon film is obtd. by impregnating the base material with an org. solvent of a polyamide resin (more particularly an arom. polyimide resin). |
