LASER ANNEALING EQUIPMENT

摘要

PURPOSE:To provide laser annealing equipment capable of precisely controlling the strength of laser beam according to annealing conditions at the time of annealing a work by the laser beam. CONSTITUTION:This equipment has a laser generator 1, a chamber 3 in which a work 5 to be subjected to annealing treatment by the laser beam outputted from the laser generator is disposed, a beam-introducing passage 2 for introducing the laser beam outputted from the laser generator into the chamber, a control gas cylinder 9 for supplying a gas having the prescribed absorptivity with respect to the laser beam into the beam-introducing passage, a detection sensor 13 for detecting the concentration of the gas in the beam-introducing passage, and a controller 12 for controlling a second control valve 11 by the detection sygnal from the detection sensor and setting the concentration of the gas in the beam-introducing passage.