| 摘要 |
A positioning device, includes a first positioning portion for moving an article in a direction substantially perpendicular to a predetermined plane and/or in a direction inclined with respect to the predetermined plane; a second positioning portion for moving the article in a direction substantially parallel to the predetermined plane, wherein the first positioning portion is mounted on the second positioning portion; a base member on which the second positioning portion is mounted; and a position detecting system for controlling movement of the article through the first positioning portion, the position detecting system being operable to measure displacement with respect to the surface of the base member.
|
