发明名称 |
Group III-V compound crystal article using selective epitaxial growth |
摘要 |
A III-V group compound crystal article comprises a substrate having a non-nucleation surface with smaller nucleation density (SNDS) and a nucleation surface (SNDL) which is arranged adjacent to said non-nucleation surface (SNDS), has a sufficiently small area for a crystal to grow only from a single nucleus and a larger nucleation density (NDL) than the nucleation density (NDS) of said non-nucleation surface (SNDS) and is comprised of an amorphous material, and a III-V group compound monocrystal grown from said single nucleus on said substrate and spread on said non-nucleation surface (SNDS) beyond said nucleation surface (SNDL).
|
申请公布号 |
US5281283(A) |
申请公布日期 |
1994.01.25 |
申请号 |
US19920985751 |
申请日期 |
1992.12.04 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TOKUNAGA, HIROYUKI;YONEHARA, TAKAO |
分类号 |
C30B25/02;C30B25/18;H01L21/20;(IPC1-7):H01L21/20 |
主分类号 |
C30B25/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|