发明名称 Group III-V compound crystal article using selective epitaxial growth
摘要 A III-V group compound crystal article comprises a substrate having a non-nucleation surface with smaller nucleation density (SNDS) and a nucleation surface (SNDL) which is arranged adjacent to said non-nucleation surface (SNDS), has a sufficiently small area for a crystal to grow only from a single nucleus and a larger nucleation density (NDL) than the nucleation density (NDS) of said non-nucleation surface (SNDS) and is comprised of an amorphous material, and a III-V group compound monocrystal grown from said single nucleus on said substrate and spread on said non-nucleation surface (SNDS) beyond said nucleation surface (SNDL).
申请公布号 US5281283(A) 申请公布日期 1994.01.25
申请号 US19920985751 申请日期 1992.12.04
申请人 CANON KABUSHIKI KAISHA 发明人 TOKUNAGA, HIROYUKI;YONEHARA, TAKAO
分类号 C30B25/02;C30B25/18;H01L21/20;(IPC1-7):H01L21/20 主分类号 C30B25/02
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