| 摘要 |
<p>PURPOSE:To vaporize a liquefied mixed gas consisting of two components of gases, having large difference of the boiling point between them at a constant concentration. CONSTITUTION:An electromagnet valve 3 is connected to the discharge port of a gas cylinder 1 in which a liquefied mixed gas is sealed, which comprises two components of gases, having large difference of the boiling point between them. A vaporizer 4 is connected to the electromagnet valve 3, and a heat exchanger 10 is connected to the vaporizer 4, and the opening/closing operation of the electromagnet valve 3 is intermittently controlled by a control circuit 11.</p> |
