发明名称 INSPECTION OF WIRE BONDING IN ELECTRONIC COMPONENT
摘要 PURPOSE:To test a junction between a metal wire and an electrode pad accurately when wire-bonding the electrode pad for wire bonding and a lead terminal, etc., with the thin metal wire on a semiconductor chip, etc. CONSTITUTION:A probe for conduction 9 is brought into contact with an electrode pad for wire bonding 5 or a part which is joined to the electrode pad and then voltage is applied between the probe 9 and a metal wire 7 which is joined to the electrode pad 5.
申请公布号 JPH0613439(A) 申请公布日期 1994.01.21
申请号 JP19920165776 申请日期 1992.06.24
申请人 ROHM CO LTD 发明人 KONISHI TAKAHIKO
分类号 G01R31/02;G01R31/26;H01L21/60;H01L21/66 主分类号 G01R31/02
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