| 摘要 |
<p>PURPOSE:To provide the process for production of a pellicle which can form a tacky adhesive layer allowing easy discovery of the foreign matter sticking thereto at the time of a visual inspection with good productivity and can uniformly form the tacky adhesive layer even in the tapered part of a pellicle frame chamfered at the inner flanks. CONSTITUTION:This process for production of the pellicle consists in elongating a tacky adhesive liquid drop 3 placed on the pellicle frame 1 by means of a jig 2, then removing the excess tacky adhesive and drying the adhesive, thereby forming the tacky adhesive layer 4 at the time of forming the tacky adhesive layer 4 on the inner flanks of the pellicle frame 1.</p> |
