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发明名称
SEMICONDUCTOR WAFER AND ITS MANUFACTURE AND SEMICONDUCTOR DEVICE AND ITS TEST BOARD
摘要
申请公布号
JPH0611537(A)
申请公布日期
1994.01.21
申请号
JP19920169358
申请日期
1992.06.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKAJIMA MICHIO
分类号
G01R31/26;G01R31/28;H01L21/326;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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