METHOD OF FORMING FINE PATTERN,申请号JP19920170699-传众专利搜索

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发明名称	METHOD OF FORMING FINE PATTERN
摘要
申请公布号	JPH0613353(A)	申请公布日期	1994.01.21
申请号	JP19920170699	申请日期	1992.06.29
申请人	MITSUBISHI ELECTRIC CORP	发明人	FUJIWARA KEIJI
分类号	H01L21/30;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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