发明名称 METHOD OF CONTROLLING THE PRESSURE IN DIFFUSING FURNACE
摘要 The method comprises the steps of providing the furnace with a gas inlet, a gas outlet, an adjustable valve for the gas outlet, and a furnace door and door flange. A predetermined preset pressure to be maintain within the furnace is established, gas is introduced into the furnace and the internal pressure within the furnace is measured. The measured pressure is compared with the preset pressure and the valve of the gas outlet is adjusted in response to the measured internal pressure to provide a constant pressure within the furnace. Internal gas flow is maintained constant and is measured through the furnace door by a pressure gauge. The gas is allowed to be discharged through the adjustable valve of the gas outlet connected to the door flange.
申请公布号 KR940000499(B1) 申请公布日期 1994.01.21
申请号 KR19900019747 申请日期 1990.12.03
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, YUN - KI
分类号 H01L21/22;(IPC1-7):H01L21/22 主分类号 H01L21/22
代理机构 代理人
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