| 摘要 |
PURPOSE:To primarily detect the information on the composition of a sample from the surface to the several atomic layers. CONSTITUTION:An ion excitation X-ray analyzer comprises an FIB part 3, by which ion beam 1 narrowly squeezed is applied on a sample surface 2 to carry out image observation, and an X-ray detector 6 provided so that a generated characteristic X-ray 4 has the same taking-out angle as that of a whole reflection critical angle phicrit through a slit 5. The characteristic X-ray detected by the X-ray detector provided in the direction of the critical angle phicrit is only the characteristic X-ray generated in the lateral direction of the surface, and only the atoms existing on the very surface of the sample can thus be analyzed with high accuracy. |
