发明名称 CR-FE ALLOY MULTILAYER FILM
摘要 PURPOSE:To obtain a Cr-Fe alloy multilayer film having a high saturation magnetization and a high permeability. CONSTITUTION:A nitrogen-containing Fe alloy thin film having a nitrogen content (x) (an atomic %) set on the condition of 1<x<20 or having a nitrogen content (x) (an atomic %) set on the condition of 1<x<20.0 and an oxygen content (y) (an atomic %) set on the condition of 0.01<y<20 is formed on a polycrystalline Cr thin film with the face (100) orientated in parallel to a substrate on the non-crystalline substrate, whereby a Cr-Fe alloy multilayer film having a high saturation magnetization and a high permeability can be obtained. In order to obtain a Cr (100) orientation film, a glass thin film or an MgO thin film may be used as a base.
申请公布号 JPH0613235(A) 申请公布日期 1994.01.21
申请号 JP19920111985 申请日期 1992.04.30
申请人 NIPPON STEEL CORP 发明人 TAKEBAYASHI SHIGETO;INOUE YOSHIHARU
分类号 C23C14/06;H01F1/14;H01F10/14;H01F10/30;H01F10/32 主分类号 C23C14/06
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