INTEGRATING METHOD OF ION QUANTITY

摘要

PURPOSE:To provide a method for determining the integrated value of the quantity of ions incident on a target with good accuracy even when the quantity of ions irradiating the target gradually increases from a zero level at first. CONSTITUTION:A peak value PS of a measurement waveform MS at a starting period between a point t0 at which the amount of ions irradiating a target increases from a zero level, and a starting point t1 of the cycle of the measurement waveform directly after the point t0. Calculation of PSXTS is carried out by using the peak value PS and the time length TS of the starting period, and the result is added to the integrated value of the amount of ions.