| 摘要 |
<p>PURPOSE:To obtain a highly reliable fluid flow sensor which can detect the flow rates of fluid flows over a wide range. CONSTITUTION:A bridge section 3 is formed on a semiconductor substrate 1 with a dielectric film 4 in between and four thin film heat detecting bodies 11, 12, 13, and 14 are formed on the section 3 so that a Wheatstone bridge circuit can be formed of the bodies 11, 12, 13, and 14. The bodies 11, 12, 13, and 14 are also used as heating bodies and temperature measuring resistor bodies.</p> |
