| 摘要 |
PURPOSE:To provide an excimer laser of a simple structure in which adjustment is facilitated for uniform beam intensity by placing a prism in front of the total reflection mirror of its optical resonator. CONSTITUTION:An excimer laser oscillator 20 comprises a laser container 2, an optical resonator having a total reflection mirror 3 and a partial reflection mirror 4, and a prism 21. The prism 21, having an apex 21B and sides 21C and 21D, is placed at a predetermined distance from the total reflection mirror between the laser container and the total reflection mirror. The prism can be moved to obtain the most uniform beam intensity. The prism is arranged in such a manner that its plane of incidence 21A is parallel with the Z-axis and perpendicular to the X-Y plane and its apex 21B is opposed to the total reflection mirror 3. |
