首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH0613350(A)
申请公布日期
1994.01.21
申请号
JP19920170979
申请日期
1992.06.29
申请人
SONY CORP
发明人
YANAGIDA TOSHIHARU
分类号
H01L21/302;C23F4/00;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Fremgangsmåte ved delignifisering av lignocellulosefibre
RADIO-TELEPHONE CHARGING SYSTEM
CRT
MIS-CONVERGENCE COMPENSATING DEVICES
DATA TRANSMISSION CONTROL METHOD IN TICOM SYSTEM BUS
GETTER FOR CRT
Control circuit and system for a switched reluctance machine and method of operating
Engine management system
LIQUID CRYSTAL OPTICAL WAVEGUIDE DISPLAY SYSTEM.
Övelses-bunnmine
Bulklast-transportör for havner og lignende
VIDEO CAMERA FOR OBSERVING OBJECTS IN THE MOUTH OF A PATIENT.
Feilström-beskyttelsesbryter
Rotary Union
Method and apparatus for recognizing cursive writing from sequential input information
An electrically operated well packer
Medication dispensing unit
BACTERICIDAL AND/OR FUNGICIDAL PLASTIC OBJECTS FOR MEDICAL USES.
Power supply systems
APPARATUS, SYSTEM AND METHOD FOR REAL-TIME WAFER TEMPERATURE MEASUREMENT BASED ON LIGHT SCATTERING