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发明名称
METHOD OF PLASMA CVD FOR FABRICATING THIN FILM
摘要
申请公布号
JPH0613335(A)
申请公布日期
1994.01.21
申请号
JP19930064925
申请日期
1993.03.24
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TAKAHASHI KIYOSHI;MURAI MIKIO;ODAGIRI MASARU;UEDA HIDEYUKI;OCHI YUKIKAZU;HIWATARI TATSUYA
分类号
C23C16/50;C23C16/27;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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