Beschleunigungsmesser.

摘要

An accelerometer having, a movable electrode which is movable according to acceleration, a fixed electrode disposed in opposition to the movable electrode, an output means for generating an output voltage which is proportional to the acceleration by measuring a gap between the movable electrode and the fixed electrode, a pulse width modulation means for generating pulses, wherein a pulse width of the pulses is modulated according to the output voltage, and a feedback means for feeding back an electrostatic force which is proportional to the pulse width of the pulses from the pulse modulation means between the movable electrode and the fixed electrode. As the acceleration in the acceleration sensor is linearly detected, the acceleration sensor is easily adjusted.