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发明名称
VAPOR PHASE EPITAXY METHOD FOR COMPOUND SEMICONDUCTOR MIXED CRYSTAL
摘要
申请公布号
JPH0613323(A)
申请公布日期
1994.01.21
申请号
JP19920167707
申请日期
1992.06.25
申请人
JAPAN ENERGY CORP
发明人
SEKI YOJI
分类号
C30B25/02;B65B15/04;C30B29/40;C30B33/08;H01L21/205;(IPC1-7):H01L21/205
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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