MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19920060173-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH0613312(A)	申请公布日期	1994.01.21
申请号	JP19920060173	申请日期	1992.03.17
申请人	FUJITSU LTD	发明人	TAKAGI NORIMITSU
分类号	C23C14/26;C23C14/06;C30B25/02;C30B25/18;H01L21/20;H01L21/203;H01L21/306;H01L29/205;(IPC1-7):H01L21/20	主分类号	C23C14/26
代理机构		代理人
主权项
地址

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