发明名称 |
POSITIVE-ACTING RADIATION-SENSITIVE MIXTURE AND RECORDING MATERIAL PRODUCED THEREWITH |
摘要 |
The invention relates to a radiation-sensitive mixture with: a) an at least swellable binder which is insoluble in water but soluble in an aqueous-alkaline solution; b) a compound which forms an acid under the effect of actinic radiation; and c) a compound containing at least one C-O-C or C-O-Si bond which can be dissociated by an acid; which also contains at least one compound with at least one nitrogen atom in an amine or amide bond in the proportion of 0.1 to 70 mol % in relation to the maximum quantity of acid which can theoretically be generated from compound b). The content of this compound with at lest one nitrogen atom in an amine or amide bond is preferably 0.5 to 50 and especially preferably 1 to 40 mol % in relation to the maximum quantity of acid which can be theoretically generated from compound b). The boiling point of the compound at normal pressure is over 100 C, preferably above 150 and especially preferably above 180 C. The mixture is particularly applicable to the production of electronic components. The invention also concerns a recording material with a substrate and a radiation-sensitive coating. |
申请公布号 |
WO9401805(A1) |
申请公布日期 |
1994.01.20 |
申请号 |
WO1993EP01430 |
申请日期 |
1993.06.07 |
申请人 |
HOECHST AKTIENGESELLSCHAFT |
发明人 |
WENGENROTH, HORST;ROESCHERT, HORST;SPIESS, WALTER;PAWLOWSKI, GEORG;BUHR, GERHARD |
分类号 |
G03F7/004;G03F7/039;G03F7/075;H01L21/027;(IPC1-7):G03F7/004;G03F7/022 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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