Mfg. field emission cathode for flat screen use - applying series of processes to form successive solid state layers and cathode tip

摘要

A field emission cathode is formed in a series of operations that begins with the formation of a pyramid shaped hole in a substrate of silicon. Successive layers of a silicon oxidised isolating layer (13), a gate electrode layer (19), emitter layer (14) and a pyrex substrate (17) are added. The pyramid shaped emitter (18) is formed by removing the actual silicon substrate. The gate electrode layer is formed by coating with a photo resist material followed by etching. ADVANTAGE - Excellent reproducibility of form. Allows precision control of spacing between gates and emitters. Avoids additional thickening of cathode construction while achieving high productivity.