Superconducting quantum interference device with the axes of the SQUID loop, input coil, and modulation coil aligned parallel with a plane of the substrate

摘要

A superconducting quantum interference device loop, a modulation coil and an input coil are formed in parallel and their axes being parallel to a substrate, on the substrate. At least one tap is formed at a predetermined position on the input coil. In a preferred embodiment, a superconductive shield is formed on the substrate in one body. The superconductive shield surrounds the superconducting quantum interference device loop, the modulation coil and the input coil.