| 摘要 |
<p>PURPOSE:To stably and efficiently supply a high-frequency signal to a device arranged in an ultra-high vacuum. CONSTITUTION:A device 21 (the object) is arranged in an evacuated vacuum vessel 20. A coaxial cable is introduced into the vessel through a vacuum flange 34 when an electric signal is supplied to the device. A flexible hose 32 is connected to the flange, and the cable is introduced by the hose. The hose is connected to the device through a cylinder 35, and the cable is introduced into the device by an inlet terminal 33. A ceramic insulator 33b is provided to the inlet terminal to seal the vacuum side from the outside. Since the vacuum side is sealed from the outside (atmosphere) on the device side in this case, an ordinary coaxial cable can be used, and hence an electric signal is efficiently supplied with stabilized impedance.</p> |
